Spatial sensitivity distribution of surface acoustic wave resonator sensors

Abstract

The sensitivity distribution of surface acoustic wave (SAW) resonator sensors is investigated by theoretical and experimental means. It is shown that the sensitivity to mass loading varies strongly across the surface due to the confinement of acoustic energy toward the center of the device. A model is developed for this phenomenon based on the extraction of coupling of modes parameters from a rigorous boundary element method analysis based on a periodic Green's function. As SAW sensors for many applications include a layer covering the electrodes, a new technique is introduced to account for the mechanical interactions with buried electrodes. Using this technique, the sensitivity calculations are found to be in good agreement with measurements. It is also shown that while changes in other parameters influence sensitivity, it is velocity change that most strongly determines overall frequency change. Show more