Tantalum oxide/silicon nitride: A negatively charged surface passivation stack for silicon solar cells

dc.contributor.authorWan, Yimao
dc.contributor.authorBullock, James
dc.contributor.authorCuevas, Andres
dc.date.accessioned2015-12-10T23:36:11Z
dc.date.issued2015
dc.date.updated2015-12-10T11:51:59Z
dc.description.abstractThis letter reports effective passivation of crystalline silicon (c-Si) surfaces by thermal atomic layer deposited tantalum oxide (Ta<inf>2</inf>O<inf>5</inf>) underneath plasma enhanced chemical vapour deposited silicon nitride (SiN<inf>x</inf>). Cross-sectional transmission electron microscopy imaging shows an approximately 2 nm thick interfacial layer between Ta<inf>2</inf>O<inf>5</inf> and c-Si. Surface recombination velocities as low as 5.0 cm/s and 3.2 cm/s are attained on p-type 0.8 Ω·cm and n-type 1.0 Ω·cm c-Si wafers, respectively. Recombination current densities of 25 fA/cm2 and 68 fA/cm2 are measured on 150 Ω/sq boron-diffused p+ and 120 Ω/sq phosphorus-diffused n+ c-Si, respectively. Capacitance-voltage measurements reveal a negative fixed insulator charge density of -1.8 × 1012cm-2 for the Ta<inf>2</inf>O<inf>5</inf> film and -1.0 × 1012cm-2 for the Ta<inf>2</inf>O<inf>5</inf>/SiN<inf>x</inf> stack. The Ta<inf>2</inf>O<inf>5</inf>/SiN<inf>x</inf> stack is demonstrated to be an excellent candidate for surface passivation of high efficiency silicon solar cells.
dc.identifier.issn0003-6951
dc.identifier.urihttp://hdl.handle.net/1885/70036
dc.publisherAmerican Institute of Physics (AIP)
dc.rightsAuthor/s retain copyrighten_AU
dc.sourceApplied Physics Letters
dc.titleTantalum oxide/silicon nitride: A negatively charged surface passivation stack for silicon solar cells
dc.typeJournal article
dcterms.accessRightsOpen Accessen_AU
local.bibliographicCitation.issue20
local.bibliographicCitation.lastpage4
local.bibliographicCitation.startpage1
local.contributor.affiliationWan, Yimao, College of Engineering and Computer Science, ANU
local.contributor.affiliationBullock, James, College of Engineering and Computer Science, ANU
local.contributor.affiliationCuevas, Andres, College of Engineering and Computer Science, ANU
local.contributor.authoremailu4793143@anu.edu.au
local.contributor.authoruidWan, Yimao, u4793143
local.contributor.authoruidBullock, James, u4313019
local.contributor.authoruidCuevas, Andres, u9308750
local.description.notesImported from ARIES
local.identifier.absfor090699 - Electrical and Electronic Engineering not elsewhere classified
local.identifier.absfor090605 - Photodetectors, Optical Sensors and Solar Cells
local.identifier.ariespublicationa383154xPUB2202
local.identifier.citationvolume106
local.identifier.doi10.1063/1.4921416
local.identifier.scopusID2-s2.0-84929574223
local.identifier.uidSubmittedBya383154
local.type.statusPublished Version

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