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Hot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing

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dc.contributor.authorYan, Ting-Yang
dc.contributor.authorShen, Xiang
dc.contributor.authorWang, Rongping
dc.contributor.authorWang, Guoxiang
dc.contributor.authorDai, Shixun
dc.contributor.authorXu, Tiefeng
dc.contributor.authorNie, Qiuhua
dc.date.accessioned2021-07-02T03:39:41Z
dc.date.issued2017
dc.date.updated2020-11-23T10:37:51Z
dc.description.abstractChalcogenide glasses have shown promise in fabricating mid infrared (MIR) photonic sensing devices due to their excellent optical properties in MIR. In addition, the glass transition temperature of chalcogenide glasses are generally low, making them ideal to create the high-throughput patterns of micro-scale structures based on hot embossing that is alternative to the standard lithographic technology. In this paper, we outline the research progress in the chalcogenide waveguide based on the hot embossing method, and discuss the problems remaining to be solved and the possible solutionsen_AU
dc.format.mimetypeapplication/pdfen_AU
dc.identifier.issn1674-1056en_AU
dc.identifier.urihttp://hdl.handle.net/1885/238523
dc.language.isoen_AUen_AU
dc.publisherChinese Physical Societyen_AU
dc.rights© 2017 Chinese Physical Society and IOP Publishing Ltden_AU
dc.sourceChinese Physics Ben_AU
dc.subjectchalcogenide glassesen_AU
dc.subjecthot embossingen_AU
dc.subjectrib waveguidesen_AU
dc.subjectMIR sensingen_AU
dc.titleHot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensingen_AU
dc.typeJournal articleen_AU
local.bibliographicCitation.issue2en_AU
local.bibliographicCitation.lastpage024213-7en_AU
local.bibliographicCitation.startpage024213-1en_AU
local.contributor.affiliationYan, Ting-Yang, Ningbo Universityen_AU
local.contributor.affiliationShen, Xiang, Ningbo Universityen_AU
local.contributor.affiliationWang, Rongping, College of Science, ANUen_AU
local.contributor.affiliationWang, Guoxiang, Ningbo Universityen_AU
local.contributor.affiliationDai, Shixun, Ningbo Universityen_AU
local.contributor.affiliationXu, Tiefeng, Ningbo Universityen_AU
local.contributor.affiliationNie, Qiuhua, Ningbo Universityen_AU
local.contributor.authoruidWang, Rongping, u4219061en_AU
local.description.embargo2099-12-31
local.description.notesImported from ARIESen_AU
local.identifier.absfor090606 - Photonics and Electro-Optical Engineering (excl. Communications)en_AU
local.identifier.ariespublicationa383154xPUB5249en_AU
local.identifier.citationvolume26en_AU
local.identifier.doi10.1088/1674-1056/26/2/024213en_AU
local.identifier.scopusID2-s2.0-85013249218
local.identifier.thomsonID000402239000003
local.publisher.urlhttp://iopscience.iop.org/1674-1056en_AU
local.type.statusPublished Versionen_AU

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