Solubility Limits of Dopants in 4H-SiC
dc.contributor.author | Linnarsson, M K | |
dc.contributor.author | Zimmermann, U | |
dc.contributor.author | Wong-Leung, Jennifer | |
dc.contributor.author | Schoner, A | |
dc.contributor.author | Janson, M S | |
dc.contributor.author | Jagadish, Chennupati | |
dc.contributor.author | Svensson, Bengt Gunnar | |
dc.date.accessioned | 2015-12-13T23:13:56Z | |
dc.date.issued | 2003 | |
dc.date.updated | 2015-12-12T08:36:19Z | |
dc.description.abstract | Epitaxial 4H-SiC structures with heavily boron or aluminium doped layers have been prepared by vapour phase epitaxy. The samples have been annealed in Ar atmosphere in an RF-heated furnace between 1700 and 2000 °C for 45 min to 64 h. Secondary ion mass s | |
dc.identifier.issn | 0169-4332 | |
dc.identifier.uri | http://hdl.handle.net/1885/88359 | |
dc.publisher | Elsevier | |
dc.source | Applied Surface Science | |
dc.subject | Keywords: Annealing; Doping (additives); Furnaces; Phase composition; Precipitation (chemical); Secondary ion mass spectrometry; Solubility; Transmission electron microscopy; Vapor phase epitaxy; Solubility limits; Silicon carbide Precipitates; SiC; SIMS; Solubility limit; TEM | |
dc.title | Solubility Limits of Dopants in 4H-SiC | |
dc.type | Journal article | |
local.bibliographicCitation.lastpage | 432 | |
local.bibliographicCitation.startpage | 427 | |
local.contributor.affiliation | Linnarsson, M K, Royal Institute of Technology | |
local.contributor.affiliation | Zimmermann, U, Royal Institute of Technology | |
local.contributor.affiliation | Wong-Leung, Yin-Yin (Jennifer), College of Physical and Mathematical Sciences, ANU | |
local.contributor.affiliation | Schoner, A, ACREO AB | |
local.contributor.affiliation | Janson, M S, Royal Institute of Technology | |
local.contributor.affiliation | Jagadish, Chennupati, College of Physical and Mathematical Sciences, ANU | |
local.contributor.affiliation | Svensson, Bengt Gunnar, University of Oslo | |
local.contributor.authoremail | u9607716@anu.edu.au | |
local.contributor.authoruid | Wong-Leung, Yin-Yin (Jennifer), u9607716 | |
local.contributor.authoruid | Jagadish, Chennupati, u9212349 | |
local.description.embargo | 2037-12-31 | |
local.description.notes | Imported from ARIES | |
local.description.refereed | Yes | |
local.identifier.absfor | 091207 - Metals and Alloy Materials | |
local.identifier.ariespublication | MigratedxPub18030 | |
local.identifier.citationvolume | 203-204 | |
local.identifier.doi | 10.1016/S0169-4332(02)00694-3 | |
local.identifier.scopusID | 2-s2.0-12244291512 | |
local.identifier.uidSubmittedBy | Migrated | |
local.type.status | Published Version |
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