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Vacuum violet photo-response of AlGaN-based Metal-semiconductor-metal photodetectors

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Authors

Zhou, Dong
Lu, Hai
Chen, Dunjun
Ren, Fang-Fang
Zhang, R.
Zheng, Youdou
Li, Liang

Journal Title

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Volume Title

Publisher

Chinese Academy of Sciences

Abstract

Al0.5Ga0.5 N-based metal-semiconductor-metal photodetectors (PDs) with a large device area of 5 × 5 mm2 are fabricated on a sapphire substrate, which are tested for vacuum ultraviolet light detection by using a synchrotron radiation source. The PD exhibi

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Source

Chinese Physics Letters

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Restricted until

2037-12-31
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