Two-color InGaAs/GaAs quantum dot infrared photodetectors by selective area interdiffusion
Date
2008
Authors
Fu, Lan
Li, Qing
Kuffner, P
Jolley, Greg
Gareso, Paulus
Jagadish, Chennupati
Tan, Hark Hoe
Journal Title
Journal ISSN
Volume Title
Publisher
American Institute of Physics (AIP)
Abstract
We report the postgrowth fabrication of two-color InGaAsGaAs quantum dot infrared photodetectors (QDIPs). By capping half of the as-grown QDIP structure with titanium dioxide (Ti O2) and performing rapid thermal annealing under the optimized condition, a
Description
Keywords
Keywords: Annealing; Infrared detectors; Optical design; Optical waveguides; Optoelectronic devices; Photodetectors; Quantum electronics; Rapid thermal annealing; Rapid thermal processing; Titanium; Titanium dioxide; American Institute of Physics (AIP); As-grown; I
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Source
Applied Physics Letters
Type
Journal article