Implant Isolation of AlGaAs Multilayer DBR
Date
Authors
Coelho, A V P
Boudinov, H
Lippen, T V
Jagadish, Chennupati
Tan, Hark Hoe
Journal Title
Journal ISSN
Volume Title
Publisher
Elsevier
Abstract
AlGaAs distributed Bragg reflector (DBR) structures isolation by proton irradiation was studied. The evolution of n- and p-type DBR structures lateral sheet resistance with the irradiated proton dose was measured. The vertical isolation behavior was also
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Source
Nuclear Instruments and Methods in Physics Research: Section B