The Application and Limitations of PECVD for Silicon-based Photonics
| dc.contributor.author | Spooner, Marc | en_US |
| dc.date.accessioned | 2009-08-18T00:14:10Z | en_US |
| dc.date.accessioned | 2011-01-04T02:36:28Z | |
| dc.date.available | 2009-08-18T00:14:10Z | en_US |
| dc.date.available | 2011-01-04T02:36:28Z | |
| dc.date.issued | 2005 | |
| dc.description.abstract | This thesis presents results on the applications and limitations of plasma enhanced chemical vapour deposition for silicon-based photonics, with an emphasis on optical microcavities for the control of light emission from silicon nanocrystals. ¶ ... | en_US |
| dc.identifier.other | b22787422 | |
| dc.identifier.uri | http://hdl.handle.net/1885/48197 | |
| dc.language.iso | en | en_US |
| dc.rights.uri | The Australian National University | en_US |
| dc.subject | silicon photonics | en_US |
| dc.subject | nanocrystals | en_US |
| dc.subject | PECVD | en_US |
| dc.subject | cracks | en_US |
| dc.title | The Application and Limitations of PECVD for Silicon-based Photonics | en_US |
| dc.type | Thesis (PhD) | en_US |
| dcterms.valid | 2006 | en_US |
| local.contributor.affiliation | Research School of Physical Sciences and Engineering, Electronic Materials Engineering | en_US |
| local.contributor.affiliation | The Australian National University | en_US |
| local.description.refereed | yes | en_US |
| local.identifier.doi | 10.25911/5d7a2bb70d9fb | |
| local.mintdoi | mint | |
| local.type.degree | Doctor of Philosophy (PhD) | en_US |