The Application and Limitations of PECVD for Silicon-based Photonics

Spooner, Marc

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The Application and Limitations of PECVD for Silicon-based Photonics

Date

2005

Authors

Spooner, Marc

Abstract

This thesis presents results on the applications and limitations of plasma enhanced chemical vapour deposition for silicon-based photonics, with an emphasis on optical microcavities for the control of light emission from silicon nanocrystals. ¶ ...