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Semiconductor Texturing Process

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dc.contributor.authorWeber, Klaus Johannesen_AU
dc.contributor.authorBlakers, Andrew Williamen_AU
dc.date.accessioned2019-04-05T00:28:21Z
dc.date.available2019-04-05T00:28:21Z
dc.date.created29/11/2002en_AU
dc.date.submitted29/11/2001en_AU
dc.identifier.govdoc2002342438en_AU
dc.identifier.patentPCT/AU2002/001625en_AU
dc.identifier.patentWO2003/047004en_AU
dc.identifier.urihttp://hdl.handle.net/1885/159055
dc.publisherIP Australiaen_AU
dc.rights.holderThe Australian National Universityen_AU
dc.source.urihttp://pericles.ipaustralia.gov.au/ols/auspat/applicationDetails.do?applicationNo=2002342438en_AU
dc.subject.ipcH01L21/306en_AU
dc.titleSemiconductor Texturing Processen_AU
dc.typePatenten_AU
dcterms.accessRightsOpen Access via publisher website
local.publisher.urlhttps://www.ipaustralia.gov.au/en_AU
local.type.statusMetadata onlyen_AU

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