High quantum efficiency back-illuminated AlGaN-based solar-blind ultraviolet p-i-n photodetectors

Wang, Guo-Sheng; Lu, Hai; Xie, Feng; Chen, Dunjun; Ren, Fang-Fang; Zhang, R.; Zheng, Youdou

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High quantum efficiency back-illuminated AlGaN-based solar-blind ultraviolet p-i-n photodetectors

Date

2012

Authors

Wang, Guo-Sheng

Lu, Hai

Xie, Feng

Chen, Dunjun

Ren, Fang-Fang

Zhang, R.

Zheng, Youdou

Publisher

Chinese Academy of Sciences

Abstract

AlGaN-based back-illuminated solar-blind ultraviolet (UV) p-i-n photodetectors (PDs) with high quantum efficiency are fabricated on sapphire substrates. To improve the overall performance of the PD, a series of structural design considerations and growth