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Optical and structural properties of Ge-Sb-Se thin films fabricated by sputtering and thermal evaporation

Date

Authors

Chen, Yu

Shen, Xiang

Wang, Rongping

Wang, Guoxiang

Dai, Shixun

Xu, Tiefeng

Nie, Qiuhua

Publisher

Elsevier

Abstract

We deposited Ge28Sb12Se60 chalcogenide films using either thermal evaporation or radio-frequency magnetron sputtering techniques, and then measured their structural and optical properties using various diagnosis tools. The refractive indices of the films

Keywords

Keywords: Bulk counterpart; Bulk glass; Chalcogenide films; Chalcogenide glass; Chemical compositions; Deposited films; Diagnosis tools; Local structure; Radio-frequency-magnetron sputtering; Relative concentration; Structural and optical properties; Structural uni Chalcogenide glass; Local structure; Radio-frequency magnetron sputtering; Thermal evaporation; Thin films

URI

http://hdl.handle.net/1885/69645

Collections

ANU Research Publications

Source

Journal of Alloys and Compounds

Type

Journal article

DOI

10.1016/j.jallcom.2012.09.043

Restricted until

2037-12-31

Downloads

File

Description

01_Chen_Optical_and_structural_2013.pdf (643.2 KB)