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Reduced feature size and improved quality of liquid jet guided laser processing by controlling the intensity profile

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Date

2014

Authors

Fell, Andreas
Hopman, Sybille
Vago, Nandor
Kluska, Sven
Franklin, Evan
Weber, Klaus

Journal Title

Journal ISSN

Volume Title

Publisher

Optical Society of American (OSA)

Abstract

A way to overcome the highly speckled intensity pattern for the liquid jet guided laser processing technique is investigated. Simulations and experiments proof the feasibility of an advantageous "single speckle" pattern.

Description

Keywords

Citation

URI

http://hdl.handle.net/1885/33186

Collections

ANU Research Publications

Source

Light, Energy and the Environment, OSA Technical Digest

Type

Conference paper

Book Title

Entity type

Access Statement

License Rights

DOI

10.1364/OSE.2014.RW4B.5

Restricted until

2037-12-31

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Description
01_Fell_Reduced_feature_size_and_2014.pdf (469.31 KB)

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