Green light-induced annealing of As2S3 thin films and its impact on waveguides performance
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Madden, Steve
Rode, Andrei V
Wang, Rongping
Bulla, Douglas
Luther-Davies, Barry
Choi, Duk-Yong
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IEEE
Abstract
We present the application of photo-induced structural change in As2S3 films and its impact on waveguide performance. Light annealing is an efficient way for making the film homogeneous, hence for low-loss guides.
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2010 23rd Annual Meeting of the IEEE Photonics Society, PHOTONICS 2010
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2037-12-31
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