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Plasma Expansion From a Radio Frequency Microdischarge

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Date

Authors

Boswell, Roderick
Charles, Christine
Alexander, Peter
Dedrick, James
Takahashi, Kazunori

Journal Title

Journal ISSN

Volume Title

Publisher

Institute of Electrical and Electronics Engineers (IEEE Inc)

Abstract

Plasma expansion of a capacitively coupled radio frequency (13.56 MHz) argon microdischarge into a larger glass tube is studied by acquisition and analysis of high-resolution digital images. The microdischarge operating conditions are a flow of about 1.5

Description

Citation

Source

IEEE Transactions on Plasma Science

Book Title

Entity type

Access Statement

License Rights

Restricted until

2037-12-31