Plasma Expansion From a Radio Frequency Microdischarge
Loading...
Date
Authors
Boswell, Roderick
Charles, Christine
Alexander, Peter
Dedrick, James
Takahashi, Kazunori
Journal Title
Journal ISSN
Volume Title
Publisher
Institute of Electrical and Electronics Engineers (IEEE Inc)
Abstract
Plasma expansion of a capacitively coupled radio frequency (13.56 MHz) argon microdischarge into a larger glass tube is studied by acquisition and analysis of high-resolution digital images. The microdischarge operating conditions are a flow of about 1.5
Description
Citation
Collections
Source
IEEE Transactions on Plasma Science
Type
Book Title
Entity type
Access Statement
License Rights
Restricted until
2037-12-31