Birefringence control in plasma-enhanced chemical vapor deposition planar waveguides by ultraviolet irradiation
Date
Authors
Canning, J
Aslund, Mathias
Ankiewicz, Adrian
Dainese, M
Fernando, R
Sahu, J
Wosinski, L
Journal Title
Journal ISSN
Volume Title
Publisher
Optical Society of America
Abstract
Complete birefringence compensation is demonstrated in plasma-enhanced chemical vapor deposition waveguides by 193-nm postexposure. A single relaxation process dominates the decay in stress anisotropy, indicating that compressive stress from the substrate leads to an elastic stress anisotropy at the core.
Description
Citation
Collections
Source
Applied Optics
Type
Book Title
Entity type
Access Statement
License Rights
DOI
Restricted until
2037-12-31
Downloads
File
Description