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Traceable nanoscale length metrology using a metrological Scanning Probe Microscope

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Date

2010

Authors

Lawn, Malcolm
Hermann, Jan
Freund, Christopher H
Miles, John
Gray, Malcolm B
Shaddock, Daniel
Coleman, Victoria A
Jamting, Asa K

Journal Title

Journal ISSN

Volume Title

Publisher

SPIE - The International Society for Optical Engineering

Abstract

We give an overview of the design and planned operation of the metrological Scanning Probe Microscope (mSPM) currently under development at the National Measurement Institute Australia (NMIA) and highlight the metrological principles guiding the design of the instrument. The mSPM facility is being established as part of the nanometrology program at NMIA and will provide the link in the traceability chain between dimensional measurements made at the nanometer scale and the realization of the SI meter at NMIA. The instrument will provide a measurement volume of 100 μm × 100 μm × 25 μm with a target uncertainty of 1 nm for the position measurement.

Description

Keywords

Keywords: AFM; Australia; Dimensional measurements; Length metrology; Measurement volume; Nano scale; Nano-meter scale; Nanometrology; National measurement institute; Non-contact mode; Quartz tuning fork; Scanning probe microscope; Atomic force microscopy; Oxide mi AFM; interferometry; mSPM; non-contact mode; quartz tuning fork

Citation

URI

http://hdl.handle.net/1885/84051

Collections

ANU Research Publications

Source

Proceedings of SPIE - The International Society for Optical Engineering

Type

Conference paper

Book Title

Entity type

Access Statement

License Rights

DOI

10.1117/12.853788

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