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Fabrication of Submicron Structures by Three-Dimensional Laser Lithography

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Date

2014

Authors

Shishkin, I I
Rybin, M V
Samusev, K B
Limonov, M F
Kiyan, R V
Chichkov, B N
Belov, Pavel
Kivshar, Yuri

Journal Title

Journal ISSN

Volume Title

Publisher

MAIK Nauka-Interperiodica

Abstract

As a demonstration of unique capabilities of three-dimensional laser lithography, an example complex-shape microobject and photonic crystals with “woodpile” structure for the infrared spectral range are fabricated by this technique. Photonic dispersio

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Keywords

Citation

URI

http://hdl.handle.net/1885/60446

Collections

ANU Research Publications

Source

Journal of Experimental and Theoretical Physics Letters

Type

Journal article

Book Title

Entity type

Access Statement

License Rights

DOI

10.1134/S0021364014090112

Restricted until

2037-12-31

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01_Shishkin_Fabrication_of_Submicron_2014.pdf (903.07 KB)

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