Negative Ion Distribution in an SF6 Helicon Discharge Measured Using Electrostatic Probes

Chabert, Pascal; Sheridan, T; Boswell, Roderick; Perrin, J

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Negative Ion Distribution in an SF6 Helicon Discharge Measured Using Electrostatic Probes

Date

1999

Authors

Chabert, Pascal

Sheridan, T

Boswell, Roderick

Perrin, J

Publisher

Institute of Physics Publishing

URI

http://hdl.handle.net/1885/93487

Collections

ANU Research Publications

Source

Plasma Sources Science and Technology

Type

Journal article

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Cultural advice

Negative Ion Distribution in an SF6 Helicon Discharge Measured Using Electrostatic Probes

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