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Defining plasma polymerization: New insight into what we should be measuring

Date

Authors

Michelmore, Andrew

Charles, Christine

Boswell, Roderick

Short, Rob

Whittle, Jason D

Publisher

American Chemical Society

Abstract

External parameters (RF power and precursor flow rate) are typically quoted to define plasma polymerization experiments. Utilizing a parallel-plate electrode reactor with variable geometry, it is shown that these parameters cannot be transferred to reacto

Keywords

Keywords: functional retention; Intrinsic parameters; Ion fluxes; Parallel-plate electrodes; Plasma polymer films; Polymerization process; Power coupling efficiency; Precursor flow rates; Deposition rates; Geometry; Ions; Polymer films; Plasma polymerization deposition rate; functional retention; ion flux; plasma polymerization

URI

http://hdl.handle.net/1885/74529

Collections

ANU Research Publications

Source

ACS Applied Materials and Interfaces

Type

Journal article

DOI

10.1021/am401484b

Restricted until

2037-12-31

Downloads

File

Description

01_Michelmore_Defining_plasma_2013.pdf (860.13 KB)

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