An apparatus for measuring absolute electron scattering cross sections for molecular radicals
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Maddern, T
Hargreaves, L.R.
Bolorizadeh, M.A.
Brunger, Michael J
Buckman, Stephen
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Institute of Physics Publishing
Abstract
Electron collision cross sections for highly reactive CFx (x = 1-3) radicals are required to model technological plasmas. In spite of their importance to industry, experimental studies of electron interactions with CFx radicals are rarely reported in the
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Measurement Science and Technology
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Restricted until
2037-12-31
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