Growth, surface morphology, optical properties and electrical resistivity of e-TiNx (0.4 < x = 0.5) films
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Mangalampalli, S.R.N. Kiran
Krishna, Ghanashyam
Padmanabhan, K.A.
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Elsevier
Abstract
The growth, structure, surface morphology, optical properties and electrical resistivity studies on TiNx (0.4 < x ≤ 0.5) films is presented. The films of thickness 116-230 nm were grown on fused silica substrates by RF magnetron sputtering in 100% pure
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Applied Surface Science
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2037-12-31