Particle in cell simulation of a radiofrequency plasma jet expanding in vacuum

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Charles, C.
Hawkins, R.
Boswell, R. W.

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American Institute of Physics (AIP)

Abstract

The effect of a pressure gradient (∼133 Pa–0.133 Pa) on electron and ion energy distributions in a radiofrequency (rf at 13.56 MHz) argon plasma jet is studied using a 1D-3v Particle In Cell (PIC) simulation. The PIC domain is three times that of the 0.018 m long plasma cavity and the total simulation time is 1 ms. Ion heating and acceleration up to a drift velocity about 2000 m s⁻¹ are measured along the jet's main expansion axis. Elastic and charge exchange ion-neutral collisions histograms computed at equilibrium during 0.74 ms show that charge exchange collisions act as the main neutral heating mechanism.

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Applied Physics Letters

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