Sputtering Effects in a Helicon Plasma with an Additional Immersed Antenna
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Aanesland, Ane
Charles, Christine
Boswell, Roderick
Fredriksen, A
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Institute of Physics Publishing
Abstract
A plasma source excited by a double saddle helicon antenna outside the glass vacuum vessel has been modified by inserting a second copper antenna in contact with the plasma through the glass end plate. Both have the same frequency of 13.56 MHz but have a
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Plasma Sources Science and Technology
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Restricted until
2037-12-31
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