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Sputtering Effects in a Helicon Plasma with an Additional Immersed Antenna

Date

Authors

Aanesland, Ane

Charles, Christine

Boswell, Roderick

Fredriksen, A

Publisher

Institute of Physics Publishing

Abstract

A plasma source excited by a double saddle helicon antenna outside the glass vacuum vessel has been modified by inserting a second copper antenna in contact with the plasma through the glass end plate. Both have the same frequency of 13.56 MHz but have a

Keywords

Keywords: Antennas; Copper; Electrons; Glass; Ion bombardment; Plasma density; Plasmas; Sputtering; Temperature; Vacuum; Glass vacuum vessel; Helicon plasma; Saddle helicon antenna; Plasma sources

URI

http://hdl.handle.net/1885/87115

Collections

ANU Research Publications

Source

Plasma Sources Science and Technology

Type

Journal article

DOI

10.1088/0963-0252/12/1/311

Restricted until

2037-12-31

Downloads

File

Description

01_Aanesland_Sputtering_Effects_in_a_2003.pdf (131.78 KB)

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