Multi-variable velocity feedback controller for piezoelectric tube scanner: A "mixed" negative-imaginary and small-gain approach

Abstract

This paper presents the design and implementation of a multi-input multi-output (MIMO) velocity feedback controller (VFC) based on a recent theoretical results on “mixed” negative-imaginary and small-gain approach to damp the first resonant mode of a piezoelectric tube scanner (PTS) used in atomic force microscopes (AFMs). The identification of the MIMO dynamics of the PTS is done by using the measured data and the “mixed” negative-imaginary and small-gain approach is used to establish the internal stability between the PTS and the velocity feedback controller. Experimental results are presented to demonstrate the effectiveness of the proposed controller. Show more