Energy Balance in a Low Pressure Capacitive Discharge Driven by a Double-saddle Antenna

Charles, Christine; Boswell, Roderick; Lieberman, M

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Energy Balance in a Low Pressure Capacitive Discharge Driven by a Double-saddle Antenna

Date

2003

Authors

Charles, Christine

Boswell, Roderick

Lieberman, M

Publisher

American Institute of Physics (AIP)

Abstract

The energy balance in a low pressure capacitive discharge driven by a double-saddle antenna was investigated. The palsma parameters were measured by using a retarding field energy analyzers. The results showed that the ion acceleration into the glass along the antenna and fast electrons escaping the plasma accounted for most of the power deposition to the walls.