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Nano- and microstructuring of graphene using UV-NIL

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Date

2012

Authors

Bergmair, I
Hackl, Wolfgang
Losurdo, Maria
Helgert, Christian
Isic, G
Rohn, Michael
Jakovljevic, Milka M
Mueller, Thomas
Giangregorio, Maria
Kley, E.-B.

Journal Title

Journal ISSN

Volume Title

Publisher

Institute of Physics Publishing

Abstract

Description

Keywords

Keywords: Dielectric substrates; Electronic application; Electronic quality; Fabrication procedure; Feature sizes; High-throughput; Large-area patterning; Micro structuring; Nano-structuring; Polycrystalline nickels; UV nanoimprint lithography; Wafer-scale; Chemica

Citation

URI

http://hdl.handle.net/1885/72241

Collections

ANU Research Publications

Source

Nanotechnology

Type

Journal article

Book Title

Entity type

Access Statement

License Rights

DOI

10.1088/0957-4484/23/33/335301

Restricted until

2037-12-31

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Description
01_Bergmair_Nano-_and_microstructuring_of_2012.pdf (1.11 MB)

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