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Effect of carbon codoping on boron diffusion in amorphous silicon

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dc.contributor.authorEdelman, L A
dc.contributor.authorJin, S
dc.contributor.authorJones, K S
dc.contributor.authorElliman, Robert
dc.contributor.authorRubin, L
dc.date.accessioned2015-12-08T22:27:13Z
dc.date.available2015-12-08T22:27:13Z
dc.date.issued2008
dc.date.updated2015-12-08T09:17:49Z
dc.description.abstractThe effect of carbon codoping on boron diffusion in amorphous silicon is investigated during low temperature annealing. The diffusivity of boron is unaffected by carbon codoping, but the fraction of mobile boron is observed to increase with increasing carbon concentration. A concomitant reduction in boron clustering is also observed at higher carbon coimplant concentrations, consistent with a change in the local trap concentration. This is consistent with carbon possibly acting as a trap site for boron and thereby changing the size and dynamics of the boron cluster formation.
dc.identifier.issn0003-6951
dc.identifier.urihttp://hdl.handle.net/1885/33979
dc.publisherAmerican Institute of Physics (AIP)
dc.sourceApplied Physics Letters
dc.subjectKeywords: Amorphous carbon; Amorphous silicon; Annealing; Boron; Boron compounds; Carbon; Carbon clusters; Chlorine compounds; Concentration (process); Diffusion; Diffusion in solids; Semiconductor doping; Silicon; Boron clusters; Boron diffusions; Carbon concentra
dc.titleEffect of carbon codoping on boron diffusion in amorphous silicon
dc.typeJournal article
local.bibliographicCitation.issue072107
local.bibliographicCitation.lastpage3
local.bibliographicCitation.startpage1
local.contributor.affiliationEdelman, L A, University of Florida
local.contributor.affiliationJin, S, University of Florida
local.contributor.affiliationJones, K S , University of Florida
local.contributor.affiliationElliman, Robert, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationRubin, L, Axcelis Technologies
local.contributor.authoruidElliman, Robert, u9012877
local.description.notesImported from ARIES
local.identifier.absfor091207 - Metals and Alloy Materials
local.identifier.ariespublicationu3488905xPUB108
local.identifier.citationvolume93
local.identifier.doi10.1063/1.2975833
local.identifier.scopusID2-s2.0-50249121856
local.identifier.thomsonID000259010300036
local.type.statusPublished Version

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