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Complementary resistive switching in niobium oxide-based resistive memory devices

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Authors

Liu, Xinjun
Sadaf, Sharif Md.
Park, Sangsu
Kim, Seonghyun
Cha, Euijun
Lee, Daeseok
Jung, Gun-Young
Hwang, Hyunsang

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Institute of Electrical and Electronics Engineers (IEEE Inc)

Abstract

For the applications of resistive random access memory (RRAM), we study the complementary resistive switch (CRS) behavior of a bilayer Nb2O 5-x/NbOy RRAM. The CRS effect is explained by the redistribution of oxygen vacancies inside the two niobium oxide layers. Improved CRS effects were observed using W top electrode (TE) instead of Pt, which can be attributed to the oxygen barrier layer derived from a self-formed WO x layer between the W TE and the Nb2 O5-x oxide film. The niobium oxide-based CRS devices within a single memory cell can be directly integrated into a crossbar memory array without the need of extra diodes; this can significantly reduce the fabrication complexity.

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IEEE Electron Device Letters

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Restricted until

2037-12-31