Silicon liquid phase epitaxy for epilift solar cells

Abstract

Silicon liquid phase epitaxy (LPE) is a suitable silicon deposition process for the fabrication of thin film silicon solar cells. In this paper we discuss the design and operation of a batch LPE system which is a first step towards mass production. The issue of melt cost can be addressed by efficient recovery of the melt and by switching to more widely available metals, such as tin. Layers grown by the epilift technique using a tin melt have displayed excellent coverage and morphology. Epitaxial layers can be detached by both chemical and mechanical means, with only minimal consumption of the substrate material.