Direct observation of irradiation-induced nanocavity shrinkage in Si

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dc.contributor.authorZhu, X. F.
dc.contributor.authorWilliams, J. S.
dc.contributor.authorConway, M. J.
dc.contributor.authorRidgway, M. C.
dc.contributor.authorFortuna, F.
dc.contributor.authorRuault, M.-O.
dc.contributor.authorBernas, H.
dc.date.accessioned2015-10-15T00:02:19Z
dc.date.available2015-10-15T00:02:19Z
dc.date.issued2001-11-19
dc.date.updated2015-12-10T11:11:55Z
dc.description.abstractNanocavities in Si substrates, formed by conventional H implantation and thermal annealing, are shown to evolve in size during subsequent Si irradiation. Both ex situ and in situ analytical techniques were used to demonstrate that the mean nanocavity diameter decreases as a function of Si irradiation dose in both the crystalline and amorphous phases. Potential mechanisms for this irradiation-induced nanocavity evolution are discussed. In the crystalline phase, the observed decrease in diameter is attributed to the gettering of interstitials. When the matrix surrounding the cavities is amorphized, cavity shrinkage may be mediated by one of two processes: nanocavities can supply vacancies into the amorphous phase and/or the amorphous phase may flow plastically into the nanocavities. Both processes yield the necessary decrease in density of the amorphous phase relative to crystalline material.
dc.identifier.issn0003-6951en_AU
dc.identifier.urihttp://hdl.handle.net/1885/15924
dc.publisherAmerican Institute of Physics (AIP)
dc.rightshttp://www.sherpa.ac.uk/romeo/issn/0003-6951..."Publishers version/PDF may be used on author's personal website, institutional website or institutional repository" from SHERPA/RoMEO site (as at 15/10/15). Copyright 2001 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Applied Physics Letters and may be found at https://doi.org/10.1063/1.1413497
dc.sourceApplied Physics Letters
dc.titleDirect observation of irradiation-induced nanocavity shrinkage in Si
dc.typeJournal article
local.bibliographicCitation.issue21en_AU
local.bibliographicCitation.lastpage3418en_AU
local.bibliographicCitation.startpage3416en_AU
local.contributor.affiliationZhu, Xiaohua, College of Physical and Mathematical Sciences, CPMS Research School of Physics and Engineering, Department of Electronic Materials Engineering, The Australian National Universityen_AU
local.contributor.affiliationWilliams, James, College of Physical and Mathematical Sciences, CPMS Research School of Physics and Engineering, Department of Electronic Materials Engineering, The Australian National Universityen_AU
local.contributor.affiliationConway, Martin, College of Physical and Mathematical Sciences, CPMS Research School of Physics and Engineering, Department of Electronic Materials Engineering, The Australian National Universityen_AU
local.contributor.affiliationRidgway, Mark C, College of Physical and Mathematical Sciences, CPMS Research School of Physics and Engineering, Department of Electronic Materials Engineering, The Australian National Universityen_AU
local.contributor.affiliationFortuna, Frank Nicholas, Universite d'Evry, Franceen_AU
local.contributor.affiliationRuault, M-O, Universite Paris, Franceen_AU
local.contributor.affiliationBernas, Harry, CNRS, Franceen_AU
local.contributor.authoremailjim.williams@anu.edu.auen_AU
local.contributor.authoruidu8809701en_AU
local.description.notesImported from ARIESen_AU
local.description.refereedYes
local.identifier.absfor020406en_AU
local.identifier.absfor091299en_AU
local.identifier.absfor100799en_AU
local.identifier.ariespublicationMigratedxPub1737en_AU
local.identifier.citationvolume79en_AU
local.identifier.doi10.1063/1.1413497en_AU
local.identifier.scopusID2-s2.0-0035914678
local.identifier.uidSubmittedByu3488905en_AU
local.publisher.urlhttps://www.aip.org/en_AU
local.type.statusPublished Versionen_AU

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