Damage Accumulation in Si Crystal During Ion Implantation at Elevated Temperatures: Evidence of Chemical Effects
Loading...
Date
Authors
de Souza, J P
Suprun-Belevich, Y
Boudinov, H
Cima, C
Journal Title
Journal ISSN
Volume Title
Publisher
American Institute of Physics (AIP)
Abstract
Description
Keywords
Citation
Collections
Source
Journal of Applied Physics