Study of Diffusivity and Electrical Properties of Zr and Hf in Silicon

Vyvenko, O F; Sachdeva, R; Istratov, A A; Armitage, R; Weber, E R; Deenapanray, Prakash; Jagadish, Chennupati; Gao, Yue; Huff, H R

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Study of Diffusivity and Electrical Properties of Zr and Hf in Silicon

Date

2002

Authors

Vyvenko, O F

Sachdeva, R

Istratov, A A

Armitage, R

Weber, E R

Deenapanray, Prakash

Jagadish, Chennupati

Gao, Yue

Huff, H R

Publisher

Electrochemical Society Inc

URI

http://hdl.handle.net/1885/72479

Collections

ANU Research Publications

Source

Proceedings of the Ninth International Symposium on Silicon Materials Science and Technology

Type

Conference paper

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Study of Diffusivity and Electrical Properties of Zr and Hf in Silicon

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