Ion-Current Downstream of a Carbon Dioxide Helicon Double Layer
Date
2011
Authors
Charles, Christine
Hawkins, Rhys
Boswell, Roderick
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Volume Title
Publisher
Institute of Electrical and Electronics Engineers (IEEE Inc)
Abstract
Energy-resolved ion measurements in a carbon dioxide helicon radio-frequency plasma containing an oblique current-free double layer are obtained using a retarding field energy analyzer for standard operating conditions (i.e., 0.4 mTorr, 250 W, and 140 G). Two ion populations corresponding to thermal ions and an energetic ion beam, respectively, are observed and spatially mapped downstream of the double layer, which is in the region of diverging field lines. The measurements are mirrored about the main reactor axis using cylindrical geometry, and a 3-D image is generated.
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Keywords
Keywords: 3-D image; Current-free double layer; Cylindrical geometry; Double layers; Energetic ion beams; Field energy; Field lines; Ion population; Radio frequency plasma; Standard operating conditions; Thermal ions; Carbon dioxide; Cylinders (shapes); Helicons; I Ion beams; plasma sources
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Source
IEEE Transactions on Plasma Science
Type
Journal article
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Restricted until
2037-12-31
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