Ultrafast Ablation with High-Pulse-Rate Lasers. Part II: Experiments on Laser Deposition of Amorphous Carbon Films
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Rode, Andrei V
Luther-Davies, Barry
Gamaly, Eugene G
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American Institute of Physics (AIP)
Abstract
Amorphous carbon films were grown using ultrafast pulsed laser deposition from Q-switched and mode-locked Nd:YAG lasers. High repetition rate laser ablation resulted into very high film deposition rates on the graphite targets. The ultrafast laser ablation gave amorphous films of high surface quality and of excellent thickness uniformity.
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Journal of Applied Physics