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Reduced threshold current in NbO 2 selector by engineering device structure

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Authors

Liu, Xinjun
Nandi, Sanjoy
Venkatachalam, Dinesh
Belay, Kidane
Song, Sannian
Elliman, Robert

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Institute of Electrical and Electronics Engineers (IEEE Inc)

Abstract

The leakage current scaling issues for NbO2 selector devices are investigated. By introducing a rough Pt bottom electrode (BE) (RMS roughness ∼2.5 nm) and inserting a 20-nm-thick dielectric layer (Nb2O5 and HfO2) between the BE and NbO2 layer, we show t

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IEEE Electron Device Letters

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Restricted until

2037-12-31