A Compare Study of LPCVD Silicon Nitride Deposited on (100) and (111) Silicon Surface

Jin, Hao; Weber, Klaus; Blakers, Andrew

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A Compare Study of LPCVD Silicon Nitride Deposited on (100) and (111) Silicon Surface

Date

2005

Authors

Jin, Hao

Weber, Klaus

Blakers, Andrew

Publisher

Shanghai Scientific & Technological Literature Publishing House

URI

http://hdl.handle.net/1885/84529

Collections

ANU Research Publications

Source

TECHNICAL DIGEST 15th International Photovoltaic Science and Engineering Conference (PVSEC-15)

Type

Conference paper

Full item page

Cultural advice

A Compare Study of LPCVD Silicon Nitride Deposited on (100) and (111) Silicon Surface

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