Giant pop-ins in nanoindented silicon and germanium caused by lateral cracking
Date
2008
Authors
Oliver, D. J.
Lawn, B. R.
Cook, R. F.
Reitsma, M. G.
Bradby, J. E.
Williams, J. S.
Munroe, P.
Journal Title
Journal ISSN
Volume Title
Publisher
Materials Research Society
Abstract
Giant “pop-in” displacements are observed in crystalline silicon and germanium during high-load nanoindentation with a spherical diamond tip. These events are consistent with material removal triggered by lateral cracking during loading, which poses a hazard to microelectromechanical systems (MEMS) operation. We examine the scaling of the pop-in displacements as a function of peak indentation load and demonstrate a correlation with the depth of the plastic contact zone. We argue that giant pop-ins may occur in a broad range of highly brittle materials.
Description
Keywords
Ge, Si, Fracture
Citation
Collections
Source
Journal of Materials Research
Type
Journal article