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Electron-beam patterning of polymer electrolyte films to make multiple nanoscale gates for nanowire transistors

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Date

2014

Authors

Carrad, D. J.
Burke, Adam M.
Lyttleton, R. W.
Joyce, Hannah J
Jagadish, Chennupati
Storm, Kristian
Linke, Heiner
Samuelson, Lars
Micolich, Adam Paul
Tan, Hark Hoe

Journal Title

Journal ISSN

Volume Title

Publisher

American Chemical Society

Abstract

We report an electron-beam based method for the nanoscale patterning of the poly(ethylene oxide)/LiClO4 polymer electrolyte. We use the patterned polymer electrolyte as a high capacitance gate dielectric in single nanowire transistors and obtain subthresh

Description

Keywords

Citation

URI

http://hdl.handle.net/1885/77398

Collections

ANU Research Publications

Source

Nano Letters

Type

Journal article

Book Title

Entity type

Access Statement

License Rights

DOI

10.1021/nl403299u

Restricted until

2037-12-31

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Description
01_Carrad_Electron-beam_patterning_of_2014.pdf (2.4 MB)

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