Electron-beam patterning of polymer electrolyte films to make multiple nanoscale gates for nanowire transistors
Date
2014
Authors
Carrad, D. J.
Burke, Adam M.
Lyttleton, R. W.
Joyce, Hannah J
Jagadish, Chennupati
Storm, Kristian
Linke, Heiner
Samuelson, Lars
Micolich, Adam Paul
Tan, Hark Hoe
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American Chemical Society
Abstract
We report an electron-beam based method for the nanoscale patterning of the poly(ethylene oxide)/LiClO4 polymer electrolyte. We use the patterned polymer electrolyte as a high capacitance gate dielectric in single nanowire transistors and obtain subthresh
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Nano Letters
Type
Journal article
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2037-12-31
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