Measurement and modelling of a radiofrequency micro-thruster
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Date
Authors
Charles, Christine
Boswell, Roderick
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Volume Title
Publisher
Institute of Physics Publishing
Abstract
A capacitively coupled radiofrequency (rf) (13.56MHz) cylindrical argon micro-discharge expanding into a larger glass tube is studied by performing optical and electrical measurements over a pressure range 0.35Torr and a rf power range 540W. Measurements
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Source
Plasma Sources Science and Technology
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Book Title
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Restricted until
2037-12-31