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Measurement and modelling of a radiofrequency micro-thruster

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Date

Authors

Charles, Christine
Boswell, Roderick

Journal Title

Journal ISSN

Volume Title

Publisher

Institute of Physics Publishing

Abstract

A capacitively coupled radiofrequency (rf) (13.56MHz) cylindrical argon micro-discharge expanding into a larger glass tube is studied by performing optical and electrical measurements over a pressure range 0.35Torr and a rf power range 540W. Measurements

Description

Citation

Source

Plasma Sources Science and Technology

Book Title

Entity type

Access Statement

License Rights

Restricted until

2037-12-31
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