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The effect of ion dose and annealing ambient on room temperature photoluminescence from Si nanocrystals in SiO2

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Authors

Cheylan, S
Manson, Neil
Elliman, Robert

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Elsevier

Abstract

Photoluminescence from Si implanted silica is studied as a function of ion dose and annealing ambient. The photoluminescence emission intensity from samples as-implanted and after annealing at 1000°C in Ar is shown to exhibit a distinct maximum as a func

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Nuclear Instruments and Methods in Physics Research: Section B

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DOI

Restricted until

2037-12-31
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