Atomic-level characterisation of the structure of amorphised GaAs utilising EXAFS measurements

Date

1999

Authors

Ridgway, Mark C
Glover, Christopher
Foran, Garry J
Yu, Kin Man

Journal Title

Journal ISSN

Volume Title

Publisher

Elsevier

Abstract

Extended X-ray absorption fine structure (EXAFS) analysis has been used to determine the structural parameters of stoichiometric, amorphised GaAs. Relative to a crystalline sample, the nearest-neighbor bond length and Debye-Waller factor both increased for amorphous material. In contrast, the coordination numbers about both Ga and As atoms in the amorphous phase decreased to ∼3.85 atoms from the crystalline value of four. Similar trends were evident for amorphised Ge excluding the coordination number which did not deviate from the crystalline value. The structural parameters of amorphised GaAs and Ge have been discussed in terms of the multi- and mono-elemental nature, respectively, of the two materials.

Description

Keywords

Keywords: Amorphous gallium arsenide; Extended x ray absorption fine structure; Amorphization; Amorphous materials; Crystalline materials; Ion implantation; Semiconducting gallium arsenide; Stoichiometry; X ray spectroscopy; Crystal atomic structure Amorphous GaAs; EXAFS; Extended X-ray absorption fine structure; GaAs; Ion implantation

Citation

Source

Nuclear Instruments and Methods in Physics Research: Section B

Type

Journal article

Book Title

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DOI

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2037-12-31