Silane flow rate dependence of SiOx cap layer induced impurity free interdiffusion of GaAs/AlGaAs quantum wells
Date
2000
Authors
Deenapanray, Prakash
Cohen, M
Gaff, K
Petravic, Mladen
Jagadish, Chennupati
Tan, Hark Hoe
Journal Title
Journal ISSN
Volume Title
Publisher
Electrochemical Society Inc
Abstract
Description
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Source
Journal of the Electrochemical Society
Type
Journal article