Sputtering Effects in a Helicon Plasma with an Additional Immersed Antenna
Date
2003
Authors
Aanesland, Ane
Charles, Christine
Boswell, Roderick
Fredriksen, A
Journal Title
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Volume Title
Publisher
Institute of Physics Publishing
Abstract
A plasma source excited by a double saddle helicon antenna outside the glass vacuum vessel has been modified by inserting a second copper antenna in contact with the plasma through the glass end plate. Both have the same frequency of 13.56 MHz but have a
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Keywords
Keywords: Antennas; Copper; Electrons; Glass; Ion bombardment; Plasma density; Plasmas; Sputtering; Temperature; Vacuum; Glass vacuum vessel; Helicon plasma; Saddle helicon antenna; Plasma sources
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Source
Plasma Sources Science and Technology
Type
Journal article
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Restricted until
2037-12-31
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