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Sputtering Effects in a Helicon Plasma with an Additional Immersed Antenna

Aanesland, Ane; Charles, Christine; Boswell, Roderick; Fredriksen, A


A plasma source excited by a double saddle helicon antenna outside the glass vacuum vessel has been modified by inserting a second copper antenna in contact with the plasma through the glass end plate. Both have the same frequency of 13.56 MHz but have a

CollectionsANU Research Publications
Date published: 2003
Type: Journal article
Source: Plasma Sources Science and Technology
DOI: 10.1088/0963-0252/12/1/311


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