Breakdown Behavior in Radio-frequency Argon Discharges
Date
2003
Authors
Smith, Heather
Charles, Christine
Boswell, Roderick
Journal Title
Journal ISSN
Volume Title
Publisher
American Institute of Physics (AIP)
Abstract
The radio-frequency breakdown in argon gas was investigated by using particle-in-cell simulation technique. A zero-dimensional global model was developed to study the experimental and simulated measurements of breakdown. It was found that the simulation results were in agreement with respect to the experimental results.
Description
Keywords
Keywords: Computer simulation; Electric breakdown; Electric potential; Ionization; Secondary emission; Radio-frequency discharges; Argon
Citation
Collections
Source
Physics of Plasmas
Type
Journal article