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Gettering of Pd and Cu by Nanocavities and Dislocations in Si

Brett, David Alisdair; Llewellyn, David; Ridgway, Mark C

Description

Previous workers have assumed that the metallic precipitates observed in the regions where nanocavities are found were the result of the metal filling the nanocavities, either as bulk metal or as a silicide phase. Recent TEM observations have demonstrated that many of these precipitates appear to be concentrated along lattice dislocations, rather than randomly distributed as would be expected for precipitates formed by the filling of nanocavities. Consequently, the gettering contribution of...[Show more]

CollectionsANU Research Publications
Date published: 2006
Type: Journal article
URI: http://hdl.handle.net/1885/85064
Source: Nuclear Instruments and Methods in Physics Research: Section B
DOI: 10.1016/j.nimb.2005.08.179

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