Observation of Blue Shifts in ZnO/ZnMgO Multiple Quantum Well Structures by Ion-implantation Induced Intermixing

Date

2006

Authors

Coleman, Victoria A
Buda, Manuela
Jagadish, Chennupati
Phillips, Matthew R
Koike, Kazuto
Sasa, Shigehiko
Inoue, Masataka
Yano, Mitsuaki
Tan, Hark Hoe

Journal Title

Journal ISSN

Volume Title

Publisher

Institute of Physics Publishing

Abstract

Implantation with low-energy (80 keV) oxygen ions and subsequent rapid thermal annealing at 800 °C are used to induce intermixing in a stack of 19 ZnO/Zn0.7Mg0.3O multiple quantum wells grown on sapphire by molecular beam epitaxy. Large blue shifts of mo

Description

Keywords

Keywords: Cathodoluminescence; Crystal defects; Diffusion; Ion implantation; Molecular beam epitaxy; Optoelectronic devices; Rapid thermal annealing; Semiconducting zinc compounds; Band gaps; Barrier layers; Interdiffusion; Semiconductor quantum wells

Citation

Source

Semiconductor Science and Technology

Type

Journal article

Book Title

Entity type

Access Statement

License Rights

Restricted until

2037-12-31