Disorder in Au and Cu Nanocrystals formed by Ion Implantation into Thin SiO 2
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Kluth, Patrick
Johannessen, Bernt
Glover, Christopher
Foran, Garry J
Ridgway, Mark C
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Elsevier
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Au and Cu nanocrystals (NCs) fabricated by ion implantation into thin SiO2 and annealing were investigated by means of extended X-ray absorption fine structure (EXAFS) spectroscopy and transmission electron microscopy (TEM). In particular, the EXAFS Debye-Waller (D-W) factor is studied as a function of the annealing temperature. An increased D-W factor was observed for annealing temperatures 500 °C and 800 °C with respect to samples as implanted and annealed at 1100 °C. A possible explanation for this behavior could be stress induced plastic deformation due to the different thermal expansion of the metals and the SiO2.
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Nuclear Instruments and Methods in Physics Research: Section B
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2037-12-31
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