Electron Scattering from Perfluorocyclobutane (c-C 4 F 8 )
Date
2004
Authors
Symul, Milica
Panajotovic, Radmila
Kitajima, M
Hoshino, Masamitsu
Tanaka, Hiroki
Buckman, Stephen
Journal Title
Journal ISSN
Volume Title
Publisher
American Institute of Physics (AIP)
Abstract
The scattering of electron from perfluorocyclobutane (c-C4F 8) was reported. The role of the resonant scattering in both the elastic and vibrational cross sections was also demonstrated. An excitation function for elastic scattering and vibrational excitation of the ground electronic state of C4F8 for incident energies between 0.6 and 20 eV was measured. For elastic scattering for incident electron energies from 1.5 to 100 eV, a set of differential, integral, and momentum transfer cross sections was provided.
Description
Keywords
Keywords: Approximation theory; Electric excitation; Global warming; Ionization; Microelectronics; Paraffins; Parameter estimation; Plasma etching; Silica; Spectrometers; Boltzmann analysis; Born approximation; Cross sections; Perfluorocyclobutane; Vibrational exci
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Source
Journal of Chemical Physics
Type
Journal article