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Ion-Beam-Produced Structural Defects in ZnO

Kucheyev, Sergei O; Williams, James; Jagadish, Chennupati; Zou, Jin; Evans, Cheryl; Nelson, A J; Hamza, A V


We study the evolution of lattice defects in single-crystal ZnO bombarded with 60-keV 28Si and 300-keV 197Au ions at 77 and 300 K. To characterize ion-beam-produced structural defects, we use a combination of Rutherford backscattering/channeling (RBS/C) spectrometry, cross-sectional transmission electron microscopy (XTEM), x-ray photoelectron spectroscopy, and atomic force microscopy. Results show that ZnO exhibits strong dynamic annealing, and even high-dose bombardment with heavy (197Au) ions...[Show more]

CollectionsANU Research Publications
Date published: 2003
Type: Journal article
Source: Physical Review B


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